ESEN ELEKTRONÄ°K LTD.
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Vacuum Chamber Module
Vacuum Chamber Module
The vacuum chamber module is designed for laser welding small production series of packages under vacuum or shielded atmosphere.

As an effective alternative to a full-sized glovebox, the vacuum chamber module fits inside the NOVA-6. The module consists of a vacuum chamber, vacuum pump, safety overpressure valve, baseplate and piping.

The vacuum pump evacuates the chamber to a vacuum of a few mBar. In this vacuum, the laser can weld through the cover glass.

Optionally the operator can choose to flush the chamber (and the package) with a controlled atmosphere. After 2 to 3 repeat pumping and flushing actions, the device will have an atmosphere suitable for closing the package.

Key Features Vacuum Chamber Module
TECHNICAL DATA
Inside dimensions172 mm diameter x 100 mm height
MaterialStainless steel and optical glass
Specs pump
TypeDry pump
Voltage110-230V +/- 10%
Frequency50/60 Hz
Power600W max.
Operating temperature12 to 31°C
Operating humidityMax. 80%
Absolute pressure38 mTorr (0,5 Mbar)
OptionsPressure sensor, Oxygen sensor, Humidity sensor, Automatic pump and purge cycle, Electrical/ SW integration into the NOVA-6
 
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